Once the BSEC Light Source Research Institute, under the guidance of the reborn, successfully developed the ArFi excimer laser and immersion lithography system based on the patented technology of the ArF excimer laser, although the patented technology of the immersion lithography system belongs to BSEC, according to In the patent technology transfer agreement signed by both parties, the patented technology of ArFi excimer laser belongs to GCA!
GCA produces ArFi excimer lasers, and by purchasing BSEC’s patented technology for immersion lithography systems, it can also produce immersion lithography machines.
As soon as possible, we successfully developed a magnetically suspended dual workbench system for 8-inch wafers and 350nm process technology. The process technology can be upgraded to 250nm. With a 35% increase in production efficiency, Gikon lithography machines have regained the high-end market share of the world. Lithography machine market.
What a twist!
Adrian and Thompson were in a more urgent mood than Wei Jianguo and Deng Guohui.
During the negotiation and signing of the patent technology transfer agreement, Sun Jian was not in the capital. Both Adrian and Wei Jianguo negotiated with the agency letter signed by him. Lawyers from both companies were present to supervise and signed the patent technology transfer agreement to certify it.
The patent technology transfer agreement complies with Chinese and American laws.
The Pakistan Agreement prohibits the export of 8-inch wafers and 500nm process technology semiconductor production lines, but does not ban the export of ArF excimer lasers, and the 800nm process technology patented technology is not included in the ban.
Americans know that even though China G Lithography Company spent huge sums of money to purchase ArF excimer lasers and patented 800nm process technology, it cannot produce a semiconductor production line with 6-inch wafers and 800nm process technology.
Lithography machines are called the crown jewels of the semiconductor industry, accounting for 1/3 of the total investment in a semiconductor production line. In addition to the three core technologies of light source, lens and workbench, they also require light speed correctors, energy controllers, and shutters. , energy detector, mask plate, mask table and beam shape settings, the complexity exceeds that of large aeroengines.
Just like if a general aircraft manufacturer buys a top-level aero engine, it cannot produce top-level aircraft.
The domestic lithography and semiconductor equipment industry has been stagnant for nearly ten years, and the related supporting industries have lagged too far behind and cannot be bought with money in a short time!
BSEC now has patented ArF excimer laser and 800nm process technology, as well as an original magnetically suspended dual workbench system. It can neither produce 8-inch wafers or lithography machines with 800nm process technology, nor can it produce 6-inch wafers. Semiconductor production line with 800nm process technology.
BSEC also needs to buy advanced optical systems and import 6-inch wafers, photoresist, masks and other materials and equipment. After system synthesis, it will be a photolithography machine that can produce 6-inch wafers and 800nm process technology. Count assembling.
It is said that 90% of the EUV lithography machines produced by ASML in the previous life were purchased from more than 5,000 companies around the world. However, key technologies such as EUV light sources (acquired Cymer) and dual workbench systems were owned by themselves, and they also invested in Zeiss SMT AG holds nearly 30% of the equity and controls the three core technologies of photolithography machines. Due to its monopoly operation, its net profit is as high as 50%. More than 5,000 parts companies around the world are lining up to supply parts.
As long as you get on the luxury train of ASML, the stock prices of parts companies will skyrocket.
The Anti-Monopoly Laws formulated by various countries are like a blank sheet of paper in front of ASML!
Deng Guohui obtained the ArF excimer laser patented technology. After careful study with Qian Fuqiang, assistant director of the Light Source Research Institute, he suddenly became enlightened and applied for 20 million yuan in R&D funds the next day to order new machinery and equipment. Materials, now leading the Light Source Research Institute in the new laboratory, according to the technical drawings provided by GCA, digesting and absorbing the patented technology of ArF excimer laser, preparing for the research of ArFi excimer laser and immersion system.
After the machinery, equipment and materials are in place, engineers and technicians from the light source factory will produce ArF excimer lasers according to the technical drawings provided by the light source research institute.
BSEC was formed by the merger of the three top lithography and semiconductor equipment research institutes and three supporting factories in the country. It integrates the research and development, production, packaging and testing of domestic lithography and semiconductor equipment and represents the highest level in the country. Although in The light source technology of the lithography machine is one generation behind Nikon, and the process technology is four generations behind. However, like GCA in its heyday, it has the lithography machines, silicon wafers, heat treatment, etching machines, ion implanters and equipment required for chip production. R&D and production capabilities of six major production equipment and materials including photoresist.
With the entire semiconductor industry chain, we don’t have to worry about being choked by the West, but we are big but not sophisticated, and big but not strong!
This embarrassing situation is not what reborn people want to see. It is determined by the current status of domestic lithography semiconductor research and development and production and the international environment.
There are a total of 735 cadres and workers in the former Microelectronics Center of K Academy of China, Shanghai Institute of Optics and Fine Mechanics of K Academy of China, No. 45 Institute, Factory 109, Shanghai Optical Instrument Factory and Jianhua Machinery Factory. The 13 extra people are Wei Jianguo , Li Changjie and Qian Guopei followed Sun Jian's instructions and invited 13 resigned scientific researchers with deputy senior and intermediate professional titles, including Qian Fuqiang, Deng Zhonghai and Zhang Guowei.
Baimeng book
Beijing is a metropolis that Chinese people yearn for. It has housing and registered permanent residence, and the family has become a Beijing resident from now on. It has advanced laboratories and modern factories. No one is willing to give up this rare opportunity. Cadres and workers who are not on the list want to come, but there is no way!
BSEC is not a welfare institution!
After high salary introduction, competition and selection.
Researcher Liu Mingtang serves as the director of the Photoresist Research Institute, Professor Xia Chang serves as the director of the Photolithography Machine Dual Workbench System Research Institute, Researcher Chen Yunfu serves as the director of the Etching Machine Research Institute, and Professor Yang Hongtao serves as the director of the Photolithography Machine Heat Treatment Research Institute. , Researcher Guo Xingcheng serves as the director of the Mask Research Institute, Professor Jing Qingyun serves as the director of the ion implanter research institute, and Researcher Li Guangjun serves as the director of the semiconductor information department of the lithography machine.
Professor Yang Hongtao, a 48-year-old Ph.D. in physics, comes from the Heat Treatment Institute of Huaqing University.
Forty-eight-year-old researcher Li Guangjun, who has a doctorate in computer science, comes from the Institute of Computer Science, K Academy of Sciences, China.
Forty-seven-year-old researcher Guo Xingcheng, who has a Ph.D. in materials science, comes from the Bingcheng Institute of Materials, K Academy of Sciences, China.
Qian Fuqiang, a 45-year-old Ph.D. in Physics and associate researcher at Huaqing, is interested in lithography machine light sources and KrF excimer lasers. He was specifically asked to return to the Lithography Machine Light Source Research Institute as an assistant to the director to assist Deng Guohui in continuing to research ArF Excimer laser.
Deng Zhonghai, a 43-year-old Ph.D. in materials science from NPU and associate researcher, studies silicon wafer manufacturing. He serves as assistant to the director of the Silicon Wafer Manufacturing Research Institute and assists Ouyang Min in the research and development of silicon wafer manufacturing.
Forty-one-year-old Zhang Guowei, a Ph.D. and associate researcher at Huaqing Semiconductor, studies photoresist and serves as assistant to the director of the Photoresist Research Institute.
The three research institutes are full of talented people, many of whom are leaders in domestic lithography and semiconductors!
Talents are available, funds are available, and a research institute with world-class equipment and materials is available, but without a reborn person to guide the direction, BSEC cannot catch up with Nikon Semiconductor Equipment Company even if everyone works together.
Talent and technology need to be precipitated and accumulated, and the strength of the two parties is too far apart!
With 25 million US dollars of newly imported advanced machinery and materials in place, BSEC has successfully developed a magnetically suspended dual workbench system. BSEC can independently complete the specification, architecture selection, logic design, circuit design, wiring, manufacturing, testing, and packaging of the 1.5um process technology. With nine processes including total testing, it can produce a semiconductor production line with 4-inch wafers and 1.5um process technology with independent intellectual property rights.
BSEC's current highest level can only produce semiconductor production lines that were eliminated by Western lithography and semiconductor equipment companies ten years ago!
