From March 15th to 31st, the first meeting of the Eighth National Party Committee was held in Beijing. The conference reviewed and approved the "Political Work Report" delivered by Leader Li.
"The report states that the goal of economic system reform is to establish a socialist market economic system, requiring that starting from 1993, efforts should be made to transform the operating mechanism of state-owned enterprises, develop various markets, price reform, labor wage system reform, and promote social security Breakthrough progress has been made in reforming the urban housing system and improving and strengthening macroeconomic management.
"Sun Jian, we have all read your proposal. It is very insightful and deafening about the current situation of research and development and production of domestic lithography machines. It is very far-sighted, urgent and feasible. Leader Li asked me to give you an important project." Task, the National Z Committee allocated one thousand acres of industrial land in the Zhongguancun High-tech Zone with compensation, and transferred all the 45 Institutes of the Ministry of Industry, the Microelectronics Research Center of the Chinese Academy of Sciences, the Shanghai Institute of Optics and Precision Machinery of the Chinese Academy of Sciences and their supporting factories. The cadres, employees and production equipment engaged in the research and development and production of photolithography machines and semiconductors were all separated from the original unit, and the technology patents, cadres, employees and production equipment owned by them were fully injected. The state-owned assets appraisal company assessed 200 million yuan, and the state-owned assets accounted for the shares. 40%, Taobao Holdings invested 300 million yuan, accounting for 60% of the shares, with a registered capital of 500 million yuan, and established Jingcheng Semiconductor Equipment Co., Ltd., with you as the legal person and chairman of the company, Comrade Wei Jianguo as the general manager of the company, and state-owned shares Among them, Zhongk Hospital holds 17% of the shares, the Ministry of Industry and Industry holds 13%, and the Zhongguancun Management Committee holds 10%.”
As a member of the National Party Committee, he participated in the National Party Committee for the first time. It is the responsibility of every committee member to participate in the meeting. Sun Jian wrote an article "Developing a new generation of lithography machines is China's hope to keep up with the pace of the development of integrated circuits in the world." The proposal was read out at the conference.
From the current situation of domestic lithography machine R&D and production companies, and the huge gap with the world's lithography machine R&D and production companies, it is necessary and urgent to vigorously develop a new generation of lithography machines, calling for a focus on semiconductor R&D and production such as lithography machines. The production team established a joint-stock company for photolithography machines and other semiconductor production equipment, using market-oriented methods to jointly develop and produce a new generation of photolithography machines and other semiconductor production equipment, breaking the blockade of Western countries on advanced photolithography machines and other semiconductor production equipment.
It is recommended to establish a photolithography machine and other semiconductor production equipment joint-stock company in Beijing or Shanghai in the form of a joint-stock company with investment in R&D personnel, production personnel, technology patents, production equipment and land, establish a modern enterprise management system, and break the iron rice bowl and Cadres are tenured for life, the capable are promoted, the weak are demoted, distribution is based on work, the more you work, the more you work, there is no cap on promotion, equity rewards for management and technical teams are closely related to the rise and fall of the company, data speaks for itself, a high-level view, unique insights and feasibility Strong, the words between the lines reveal the anxiety to upgrade domestic photolithography machines and other semiconductor production equipment. This proposal aroused great attention and heated discussion among the zx committee members of the Association for Science and Technology and the scientific and technological circles who participated in the meeting, and the proposal was widely circulated by leaders.
After the zx meeting, Sun Jian was retained by Deputy Leader Zhu.
On the morning of April 1, Deputy Leader Zhu met with Sun Jian in his office, Minister of the Ministry of Electronic Industry, Dean Zhou of the Academy of Sciences of China, Director Shen of the Zhongguancun Management Committee, and Wei of the Semiconductor Equipment Factory of the Microelectronics Research Center of the Academy of Sciences Director Jianguo is present.
In 1986, Factory 109 merged with some units related to the development of large-scale integrated circuits, including the Semiconductor Research Institute of the Chinese Academy of Sciences and the Institute of Computing Technology of the Chinese Academy of Sciences, to establish the Microelectronics Research Center of the Chinese Academy of Sciences. The original 109 Factory became a semiconductor equipment factory.
"Chief, I obey the arrangement and ask the chief for help. From the cadres of the three research institutes and their supporting factories, the company will be assigned a deputy general manager, a director of the lithography machine research institute, and a deputy director. I He is only responsible for the company’s major decisions.”
Although Sun Jian knew that if he stayed, he would definitely talk about how to revitalize domestic lithography machines? But he never dreamed that the country would hand over to him three domestic core research institutions that develop and produce semiconductor production equipment such as photolithography machines and their supporting factories, and establish Beijing Semiconductor Equipment Co., Ltd., referred to as bsec, invested by Taobao Holdings Company Holding shares, serving as a legal person, leading the R&D and production of domestic photolithography machines and other semiconductor production equipment.
The task is arduous but glorious!
The research and development and production of semiconductor equipment such as domestic lithography machines are at a semi-stagnant state, and the technical level is more than ten years behind Nikon, the world's leading lithography machine company.
In 1961, the three-year-old GCA American Geophysical Company built the world's first contact lithography machine.
In the 1970s, Nikon and Canon began to enter this field. As the top giants in the optical industry, the technical difficulty of a CMOS sensor in a camera was many times higher than that of the photolithography machine at that time. Like a fish in water!
In the 1970s, Kasper Instrument Company first launched the contact alignment machine and was several years ahead. Cobilt Company made an automatic production line, but the contact machine was later eliminated by the proximity machine.
In 1973, P&E, a company invested by the U.S. military, launched a projection lithography system. It was very easy to use with positive photoresist and had a high yield, so it quickly occupied the market.
In 1978, GCA launched the world's first commercial stepper lithography machine, the DSW4800, which uses a G-line mercury lamp and Zeiss optical components to image chip circuits into a ten millimeter square area at a ratio of 10:1.
In 1980, Nikon took the lead in launching Japan's first KR commercial stepper lithography machine NSR1010G, which can achieve a 1μm process with a five-fold reduction in resolution and produce lenses with higher resolution than GCA to attract customers.
American semiconductor companies such as IBM, II, AMD and HP decisively gave up American interests in the face of corporate interests and turned around and fell into the arms of Nikon.
Under the pressure of Nikon, GCA's high-end market share continued to decrease. In 1985 and 1986, it lost US$100 million and had to lay off 70% of its staff. In 1988, the American General Signal Company acquired it for US$76 million. In order to compete with Nikon, GCA was in financial trouble. Sematech US Semiconductor Manufacturing Technology Strategic Alliance funded GCA to successfully develop kr lithography machine and realize 1μm process technology. However, the process technology of Nikon lithography machine was upgraded to 800nm, GCA’s high-end market. The share has not improved much.
In 1966, Institute 109 of the Chinese Academy of Sciences and Shanghai Optical Instrument Factory jointly collaborated and successfully developed China's first lithography machine, the Model 65 contact lithography machine.
In 1981, the Semiconductor Research Institute of the Chinese Academy of Sciences successfully developed the jk1 semi-automatic proximity lithography machine.
In 1982, Factory 109, Bingcheng Measuring and Cutting Tool Factory and Acheng Relay Factory jointly developed the kha751 semi-automatic proximity lithography machine, which has completely matched the Japanese model in terms of indicators.
