Because the environment required for laser installation and operation is very harsh, they are all integrated into one component.
Before traveling all over the country, Li You and others also looked at and touched several mainstream lithography machines in Daxia, and they were already confident.
Middle-aged people who have experienced the ups and downs of human relationships are not like young people who are not familiar with the world. They will not easily get angry because of the doubts caused by others' lack of understanding.
Being slapped in the face with a product is the most satisfying thing for them.
"Now that your company is ready for adaptation, we have this model of machine in our laboratory, so let's wait and see."
Zhao Xingxia then added: "Sign a contract first to avoid accidents during the experiment and cause unnecessary losses to everyone. Is that okay?"
"There is nothing you can't do."
Gu Qing smiled and agreed. Of course he understood the other party.
Although lithography machines are not as expensive as some sports cars, they are more difficult to manufacture than sports cars. If one is damaged, it will be a waste of money.
When their semiconductor department team went to other manufacturers to adjust and adapt light source equipment, they paid a test fee and deposit.
Even the legal department has made several relevant contract templates.
After signing the contract, Zhao Xingxia took Gu Qing and his team to another research room.
For an established lithography machine workshop, each experiment is very expensive.
Wearing white work clothes comparable to protective clothing, Li You and others entered the ultra-clean workroom of the lithography machine with several light source equipment components.
Zhao Xingxia watched these people skillfully open the lithography machine system, replace the light source equipment, and then skillfully divide into two teams.
Li You and his team were sitting on the computer workbench nearby, adjusting parameters with their fingers flying, while Zhang Yantai led his team to adjust the laser adjustment and energy controller of the lithography machine.
Although the light source equipment is adapted to this lithography machine, there are many small problems that need to be dealt with. Otherwise, it is normal for the lithography machine to be damaged, not to mention that the chip cannot be manufactured.
After working for a long time, Li You and Zhang Yantai reviewed it together, and then made an OK gesture to the camera in the room.
"Professor Zhao, the experiment is about to begin." Gu Qing reminded.
Zhao Xingxia nodded.
Whether it is near ultraviolet (NUV) laser, deep ultraviolet (DUV) laser, or the most high-end extreme ultraviolet EUV.
They all have the word purple, which is not a very profound question, because these light sources are all genuine purple light sources.
The steady-state micro-focusing SS1MB light source developed by Jiuzhou Technology Semiconductor Department is DUV deep ultraviolet light as the adapted light source equipment for this S1A600/20 lithography machine with a resolution of 90nm.
The light source equipment is running, and the deep ultraviolet light emitted by the laser
After correction, it enters the energy controller, beam shaping device and other equipment, and then enters the photomask stage.
The photomask for testing is placed on the photomask stage and then projected to the exposure stage through the objective lens.
An 8-inch wafer is placed on the exposure stage, with photoresist applied on it.
Half an hour later... Of course, the chip cannot be made in such a short time, but its working status and test run results can be judged.
"This, this, this..."
"This is actually true, a domestic DUV light source? I'm not dreaming, Lao Zhao."
“Excellent purity”
The young engineer who was still a little angry just now was looking at the lithography machine in the workshop, his mouth opened unconsciously, and his eyes were a little distracted.
As a middle-aged man with a family, Li You takes great care of his children.
He walked up to the man and patted him on the shoulder.
"Come to your senses, this is just the beginning."
"Huh? Huh? What to start? Can you sell this light source to us? Can we use our domestic light source now?"
The young engineer was a little incoherent, as were other developers and engineers.
Everyone in the entire laboratory and lithography machine workshop was shocked.
Daxia Enterprise’s own light source equipment!
How long have they been waiting for this day?
An old engineer from Pudong Microelectronics wiped away tears unconsciously.
When a man sheds tears, he doesn't shed them easily, but they are not sad yet.
This group of old people who have joined the domestic semiconductor industry are even more deeply touched.
When they did this back then...
“It’s better to buy than to make. It’s expensive to sell junk products, and it’s hard to use domestic products.
There are many problems with domestic products, so don’t do it and buy German light sources!
Get a photolithography machine and cheat your own people! "
The cunning and harsh words from the past are echoing in my ears now. Look at the current photolithography machine.
"Finally a good light source."
Professor Zhao took off his glasses and wiped the tears from the corners of his eyes again and again. The assistant next to him was also in tears at this moment.
Gu Qing pursed his lips and shook his head.
Although he understood the difficulties of semiconductor research in Daxia, he still underestimated the harm that the public opinion environment and the economic environment had on these researchers.
Yes, there are mature and high-end technologies abroad, and you only need to spend money to buy them, and you can enjoy perfect services.
There are still a bunch of idiots in China who are asking for sponsorships everywhere, saving money for experiments and development, and finally making some achievements. Because they have not been upgraded through market adaptation and feedback, there are flaws.
Then there was overwhelming insults and belittling, and even "domestic high-tech products" were criticized by public opinion as "fake and inferior products."
German products, neon products, and American versions are the best.
However, Pudong Microelectronics just carried these rumors and worked hard all the way until it is now able to produce 90-nanometer lithography machines.
The ARF light source described in the public information is 193 nm.
This shows that if there is a better light source, the accuracy of lithography machines will soon be improved.
"You don't know, the core component of the high-power laser requires a stable and controllable laser of more than 20,000 watts. Only Germany and the United States can supply the components of this laser.
There is a huge gap between us and them in this area. Because there is no demand, almost no company can provide the corresponding parts.
Later, Mr. Zhuang from Harbin Institute of Technology helped us connect the dots. After cooperating with them, we had to choose a DPP solution that was difficult to increase in power but did not require high-power lasers as the entry point.
Your company did really well on this project, really well. "
Professor Zhao did not ask Gu Qing whether this light source was imported from abroad. He bought a finished product to deceive them like that beast did back then.
Because there are only a few papers on this new technology light source, not to mention the finished product, where can they buy it?
However, when Gu Qing heard the word Lao Zhuang, he subconsciously asked: "Professor Zhao, are you talking about Professor Zhuang Youwei from Harbin Institute of Technology?"
Zhao Xingxia put on his glasses at this time and nodded.
"That's him. We also have several Harbin Institute of Technology students introduced by him."
Gu Qing clapped his hands.
"Isn't this fate? I have a good relationship with Professor Zhuang. Our company's bionic mechanical prosthetic limb project also has students from Harbin Institute of Technology."
The two of them started chatting about this topic, and it seemed like they had been friends for years.
