Time soon entered June, and all members of the extreme ultraviolet lithography machine project were once again shocked by Xu Yun. Even though they were prepared in their hearts, they were still shocked and speechless.
If the previous two meetings were simply surprising and unbelievable, then this time it was beyond my understanding.
Originally, after Xu Yun planned the next direction of the project, they began to study the light source.
Although everyone knows that it is very difficult, perhaps it is because Xu Yun is full of fighting spirit and passion when he joins, and wants to use his own abilities to contribute to the progress of the project.
Unexpectedly, things developed beyond everyone's expectations.
Only a few days had passed before Xu Yun held another project meeting.
At first, they thought they were discussing further research on light sources, but Xu Yun actually came up with a specific plan at the meeting.
And after research, it has been confirmed that the feasibility is very high.
"This light source production plan was designed by me. I think its power is enough to meet the needs of high-end lithography machines. Next, we should manufacture this light source as soon as possible and start testing."
In the conference room, Xu Yun looked at the people who were looking at the information in their hands and said this calmly.
That day, he used his brain to overclock to solve the light source problem, and immediately wrote down the plan in his mind.
And hold a project meeting to announce this as soon as possible after completion.
In the past, if he suddenly obtained this light source design plan, it would definitely cause a huge sensation in the outside world, and it would even be suspected that he had accidentally obtained the technology possessed by an alien civilization.
It is possible to be investigated and monitored.
But now he has already shown his strength to the outside world, and he is capable of solving the problem of photolithography machines.
So there is no need to deliberately delay more time.
At this moment, everyone in the conference room was focused on the documents. They didn't even know if they heard Xu Yun's words. In short, they did not hide the surprise and shock on their faces.
Including Luo Changhui, who is an academician.
Seeing everyone's reactions, Xu Yun knew that if they didn't break away from the current situation, they probably wouldn't listen to anything he said.
In this situation, even though I felt a bit dumbfounded, I had no choice but to keep silent.
Stay silent for now.
An unknown amount of time passed like this before Luo Changhui was the first to stop his movements and raise his eyes.
"Are you going to use the xenon fluoride light source solution?"
"That's right." Xu Yun nodded and replied.
The light source manufacturing direction he obtained by spending points is exactly the xenon fluoride light source.
Compared with other common light sources on the market, xenon fluoride light sources have better performance and are suitable for photolithography.
However, its production is difficult.
The problems faced by this light source have not been solved in China.
Luo Changhui obviously knew the situation of various light sources, so after seeing the contents in the document, he was basically sure that it was highly likely to be feasible.
In other words, as long as they manufacture the xenon fluoride light source according to the design plan in this document, it is possible to succeed. This is equivalent to completely solving the light source problem of high-end lithography machines and greatly shortening the time of domestic high-end lithography machines. R&D progress.
But what shocked him most was that the design came from Xu Yun.
He could confirm that Xu Yun had never systematically studied photolithography machines before joining the project and becoming the person in charge.
In other words, Xu Yun not only determined the research direction but also completed the plan in just ten days.
Simply a monster.
Although I have long heard that Xu Yun's talent is very powerful and he has continuously created many miracles in different fields.
But there is no clear concept.
And now he saw it.
Forcibly suppressing the excitement in his heart, he confirmed again: "Did you write this plan?"
"Although it has not been tested in practice, I think this theory is feasible."
Xu Yun replied calmly, and then asked: "Does Academician Luo think this theory is feasible?"
"You can give it a try." Luo Changhui replied solemnly.
At present, they have no other mature light source solutions, and Xu Yun's xenon fluoride light source is indeed the best choice.
In addition, the theory in the document is very detailed. If you actually start manufacturing it, it will not take long to get a stable xenon fluoride light source. Whether it can meet the requirements of the photolithography machine by then, you only need to test the power that the light source can stably emit.
If it really succeeds, domestic extreme ultraviolet lithography machines will be equivalent to overcoming a major problem.
It is a breakthrough progress.
The key is that it has not been long since the establishment of the new ultraviolet lithography machine project.
Of course it doesn't matter if you fail.
The right is to accumulate experience.
At this point in the conversation between the two of them, Professor Yang Jing, the researcher next to him, finally came to his senses, with an eloquent smile on his face.
"This plan is great. I am sure that as long as you follow the above instructions, you will be able to create a powerful and stable xenon fluoride light source."
As his words fell, several other researchers seemed to have their chat boxes opened and began to express their opinions.
"I haven't found any loopholes yet."
"The scheme theory is feasible and we should try the experiment immediately."
"The institute made a very correct decision by inviting you, Professor Xu, to be the project leader. In just a short time, you already have a solution for the light source of the extreme ultraviolet lithography machine."
After listening to the words of several researchers, Xu Yun had a calm smile on his face and spoke a little modestly.
"I have done related research on light sources before, and to be honest, I am not 100% sure about this plan."
"Don't say 100% sure, even if there is only a little bit of certainty, it is worth trying." Luo Changhui calmed down at this time, took over the conversation and added.
The Institute of Optoelectronics Technology started developing photolithography machines very early, but it has always lagged far behind overseas.
There is simply no ability to manufacture high-end chips.
Among them, the research on light sources is even more limited. It is difficult to increase the power of the light source and ensure stable output.
It is no exaggeration to say that if Xu Yun had not joined the project team, the xenon fluoride light source would have taken them a long time to study.
After all, there is nothing great about being able to create a xenon fluoride light source. The key is to ensure stable output of power and continuity.
If the light source cannot be guaranteed to be stable, no matter how high the maximum power is, it cannot be used in extreme ultraviolet lithography machines.
This alone is enough to prove Xu Yun's strength.
But who has the biggest mood swings in the conference room at the moment, it must be Liu Xing and several other postdoctoral research assistants.
Just write your thoughts on your face.
Because Xu Yun did not make too many copies of the plan, only Luo Changhui and a few other researchers saw it just now.
Suddenly seeing the reactions of researchers including Luo Changhui after reading the document, they would inevitably feel very curious, especially when they heard later that it was related to the light source, their mood swings became even more intense knowing that this was definitely big news.
In the end, Liu Xing was the first to be unable to hold on any longer, and took the initiative to ask Xu Yun over his shoulder.
"Professor Xu, can we take a look at this plan?"
Xu Yun naturally did not forget that they, the research assistants, must have the right to know since they were all members of the project team.
Besides, only by working together can we speed up the progress.
Originally, he planned to let the researchers talk after the meeting, but since they were all looking forward to it, it didn't matter.
Xu Yun's thoughts stayed here without any hesitation. He immediately picked up the plan in front of him and handed it over: "If you want to see it now, go ahead and see it."
"Thank you Professor Xu."
Liu Xing did not choose to refuse at this time. Hearing this, he quickly stepped forward to take the document and share it with the people around him.
Being able to enter the postdoctoral mobile station of the Institute of Optical Technology, Liu Xing and others are not necessarily that bad. Compared with researchers such as Yang Jing, it is just a gap in experience and qualifications.
Naturally, you will have your own judgment on the content in the file to know whether it has experimental value.
Perhaps because they were happy to have found the direction of light source research, Luo Changhui, Yang Jing and other researchers did not show any impatience, but patiently waited for Liu Xing and other postdocs to read through the documents.
I don't know how much time had passed, but Liu Xing came to his senses first. He handed the document to the person next to him and immediately looked at Xu Yun.
His eyes were full of admiration and excitement.
"Professor Xu, you are so awesome. I didn't expect that a method for making a xenon fluoride light source would be available so quickly."
As soon as he finished speaking, the others spoke one after another not to be outdone.
"I didn't expect that this method could be used to solve the difficulty of manufacturing xenon fluoride light sources. I didn't have any ideas in this regard before."
"With this plan, we will soon be able to create a stable light source."
"I can't wait to participate in the experiment."
Before Xu Yun could answer, Luo Changhui, who was sitting next to him, took the initiative and said: "Now is not the time for us to celebrate. We must at least get detailed xenon fluoride test results. Next, everyone will temporarily Stop what you are doing and go all out to create a xenon fluoride light source device." It can be seen that his entire passion has been mobilized.
What Luo Changhui said was Xu Yun's next arrangement, so he added a sentence along the way.
"Then that's the end of today's meeting. I think everyone will be very busy in the rest of the day."
After that, the meeting officially ended.
Today, I called all the project members to attend the meeting, mainly to discuss the xenon fluoride light source manufacturing plan. Now that the plan has been collectively approved, there is no need to continue to waste time.
What's more, I believe that after what happened just now, everyone can't wait to get started.
After all, it is an honor to be able to participate in the birth of China's first extreme ultraviolet lithography machine.
Of course, this is also the actual situation.
After the meeting, under the leadership of Xu Yun, everyone was assigned tasks.
Immediately start manufacturing xenon fluoride light sources.
——
Different from making xenon fluoride from scratch, the former requires constant trial and error to bear the result of low power or the inability to maintain stable output for a long time. In addition to requiring a lot of investment, this process is also very time-consuming and it is normal to not get any results in the end. .
But Xu Yun and the others are completely different.
With that design plan as a basis, this is equivalent to an open-book exam.
The process they carried out was to copy the answers on the test paper, which basically did not require much effort.
Coupled with Xu Yun's personal participation, the institute successfully manufactured a xenon fluoride light source device almost at the end of June.
In order to determine whether it can be used in high-end lithography machines, the wavelength power stability of the light source was tested that day.
"Although I think we will definitely succeed this time, I still feel a little nervous for some reason."
June 22, 2020, Jincheng, Extreme Ultraviolet Lithography Machine Project of the Institute of Optoelectronics Technology.
Outside the light source testing laboratory, Yang Jing, who was wearing white research clothes, was walking back and forth looking a little uneasy. Although he pretended to be calm on the surface, the small expression on his face still revealed his true feelings.
After participating in the manufacturing of light sources during this period, he became more convinced of the feasibility of Xu Yun's plan.
It is believed that the light source problem of extreme ultraviolet lithography machines has been solved.
But seeing that the final light source test results are about to come out, I still feel a little uneasy.
Compared with Yang Jing who couldn't sit still, Luo Changhui was obviously much calmer. He didn't forget to open the cup and drink tea while sitting on the chair next to him.
"Keep your mind at ease. Since you have chosen to trust Professor Xu, then wait patiently for the results."
"I'm not afraid." Yang Jing felt a little embarrassed when he heard Luo Changhui's words.
After all, he is also a researcher and professor who is half dead, and his behavior when encountering things is not as good as those postdocs, which is indeed somewhat inappropriate.
That being said, how many people can truly remain calm?
As the saying goes, it is difficult to accept darkness after seeing light. Xu Yun's light source solution gave them hope that domestic extreme ultraviolet lithography machines could finally be put into use.
If the final test results fail to meet the requirements, all these days of hard work will be in vain.
Although scientific research should not be afraid of failure, it is definitely a big blow to project members.
Yang Jing did not respond to Luo Changhui's words, but turned his gaze to Xu Yun, who also had a calm expression. After a slight hesitation, he opened his lips and asked.
"Professor Xu."
"Do you think we can succeed this time?"
"Of course it will succeed." Xu Yun answered firmly when he heard the words and met the other party's eyes.
After all, this is the plan he derived after spending 150 points, so he is 100% sure of it.
It can be said that the probability of special situations occurring is basically non-existent.
Because of this, he remained calm throughout the entire process and was not worried at all.
Even if Yang Jing hadn't taken the initiative to ask, he wouldn't have even planned to say a word.
But Yang Jing calmed down a lot when he heard Xu Yun's words. It was obvious that he chose to believe the test results of the light source out of trust in Xu Yun.
About ten minutes passed like this, and Liu Xing, wearing research clothes, finally walked out, holding a test data report of the xenon fluoride light source in his hand.
Almost instantly everyone's attention was focused on Liu Xing, and even Luo Changhui stood up suddenly.
Liu Xing, however, seemed not to notice anyone else and walked straight to Xu Yun, handed the report over and spoke at the same time.
"Professor Xu."
"Our xenon fluoride light source test was successful."
"This is detailed data."
Although Xu Yun had long known that this would be the result, he suddenly sped up his movements after hearing this sentence and quickly checked the detailed data above.
First, the wavelength of the xenon fluoride light source is 13.5 nanometers, which meets the requirements of extreme ultraviolet lithography machines.
The working power of the light source has successfully reached 250 watts and is very stable.
In other words, the xenon fluoride light source they manufactured can be fully used in extreme ultraviolet lithography machines, which is a big step forward from the official delivery of the first domestic high-end lithography machine.
"You all should take a look too."
Xu Yun confirmed the result and handed the reports in his hands to Yang Jing, Luo Changhui and others.
The latter had expressions of excitement on their faces.
"We really succeeded. This is a real source of extreme ultraviolet light."
"All the hard work and late nights we have put in these days are worth it. Those arrogant guys overseas would never have thought that our research and development would go so smoothly."
“It’s only thanks to Professor Xu that we can reach this point.”
While everyone was immersed in this joy, Liu Xing, who did not hide the excitement on his face, suddenly made a suggestion of his own in front of everyone.
"Professor Xu."
"Should we announce this good news immediately and let those overseas see whether we can create a high-end extreme ultraviolet lithography machine?"
This sentence was also agreed by Yang Jing, who also echoed: "Let everyone know about our major breakthrough in light sources. I will definitely be very happy to mobilize the public's trust in the semiconductor field."
But Xu Yun chose to refuse.
"There's no rush in this matter."
After shaking his head to express his attitude, he then opened his mouth to explain.
"Compared with a breakthrough in a light source, it would be better to wait until the first domestic high-end lithography machine is delivered and then announce the news to the outside world. The sensation will definitely be greater by then."
"It would be best to have a huge impact on the overseas high-end chip manufacturing industry chain."
"Besides, I think this day will come soon." Xu Yun added in a deep voice.
Both Liu Xing and Yang Jing have been impressed by Xu Yun, and naturally they will not object to his decision.
Thinking about it carefully, it is really better to hide the breakthrough in the light source first and give the outside world a big surprise when the time comes.
However, Luo Changhui heard other information from Xu Yun's words, temporarily suppressed the inexplicable excitement in his heart, and quickly asked.
"Professor Xu."
"What did you mean when you said that day will come soon?"
As soon as these words came out, others were immediately curious, and they all concentrated on waiting for Xu Yun's next words.
Xu Yun didn't mean to hide it, but a meaningful smile appeared at the corner of his mouth. He blinked and replied: "That's what it means literally. I'm studying the design of the projection system and mask. It won't take long." There will be results.”
Now that the light source problem has been completely solved, it is natural to start dealing with the other two problems.
After all, he still has a lot of points left.
I have to say that his words undoubtedly stirred up a thousand waves with one stone, and once again gave everyone present a deep shock.
Mainly based on Xu Yun's words, it seems that progress has been made in the projection system and masks.
They might not have thought about this before, but now...
Even if Xu Yun said that he could manufacture an extreme ultraviolet lithography machine in two months, he wouldn't be too surprised.
After the shock, there was ecstasy. Thinking that the emergence of domestic high-end extreme ultraviolet lithography machines is getting closer and closer, how can one not feel excited?
(End of chapter)
