"Furukawa-kun? What's wrong?" Everyone looked at him in confusion.
Taichi Furukawa said: "Just now, the Chinese Academy of Sciences announced that they have made a breakthrough in extreme ultraviolet photoresist production technology and will begin large-scale manufacturing and production of high-end photoresist!"
"What?" Representatives of several major groups stood up suddenly, "This is not something to joke about!"
"I'm not kidding!" Taichi Furukawa said, "Several photoresist companies in China announced that they have obtained technical authorization and will immediately build factories and start production!"
Everyone saw that his tone was anxious and did not sound like he was lying, so they immediately looked up the information.
Soon, they saw the news.
"Is the news confirmed to be true?" A representative of Tokyo Yinghua Group called and asked the president of the group's China region.
"It's true. We have sent people to contact them, and they also showed samples and related data!" the other party replied.
"How could it be so fast?" In the venue, the representatives of these Sakura photoresist companies looked at each other. It has only been a month since they stopped selling, right?
In one month, their technical advantages and product monopoly will be gone?
Even Aoki Dagui was confused. If this was really the case, wouldn't they have shot themselves in the foot?
They have just withdrawn from the Chinese market, and China has its own high-end photoresist. Isn't this giving up market share in vain? Is there such a stupid thing in the world?
"Baga!" the JSR representative yelled angrily, "This is a market worth tens of billions of dollars a year, and it was handed over to others just because of a stupid agreement?"
Aoki Dagui did not dare to speak casually. The energy of these multinational groups was not small. He could only say with a guilty conscience: "Maybe they have broken through this technology long ago and only announced it now."
"No!" Furukawa Taichi said angrily, "This is entirely caused by your stupid agreement!"
"I got news that just because of this matter, China mobilized experts from all over the country and joined tens of thousands of companies in research and development, so the progress is so fast! Under normal circumstances, they would never be able to break through extreme ultraviolet photoresist technology so quickly !”
After hearing what Furukawa Taichi said, other representatives glared at Aoki Daiki. It took them decades to compete with companies from the Light Country and finally establish themselves as the international leader in photoresist. Unexpectedly, they would be overtaken by others within a month!
All of this is caused by that "comprehensive cooperation" agreement!
"Aoki-kun, we need an explanation!" said the JSR representative.
"Our losses were caused by the manager of Sakura Country! He must come up with a solution!" said the representative of Tokyo Yinghua.
"Our group will issue a letter of protest!" Representatives of Fujifilm said coldly. The protest they were talking about was not about employees taking to the streets to protest, but about gaming at a higher level.
These big capitals are inextricably linked to the management of Sakura Island. Aoki Daiki broke out in a cold sweat behind his back. He knew that his group had offended a big capital group!
When the time comes, someone will definitely have to take the blame to calm their anger, and I will most likely become the one taking the blame!
"Why, it's only been a month!" Aoki Dagui was shouting in his heart. If this technological breakthrough were a few months later, China would definitely give in, but why so fast?
…
The breakthrough of extreme ultraviolet photoresist represents that the most critical material issue in photolithography machines and chip manufacturing has been solved.
At the same time, Lu Jianye’s team has polished the “lens” needed for the extreme ultraviolet lithography machine. In the past, this thing was one of the products that could not be bought with money. Only Hans' Zeiss company could manufacture it. But now, China can manufacture it by itself.
Other high-end parts are also being manufactured simultaneously.
In terms of chip design, it is relatively simple. China could have designed high-precision chips, but it just couldn't manufacture them. He Xingzhou made slight improvements and completed the design of the 3-nanometer process chip.
Now, between the manufacture of extreme ultraviolet lithography machines and the production of 3-nanometer process chips, there is only one last problem left - extreme ultraviolet light knife!
He Xingzhou came to the Institute of Optoelectronics and studied with Academician Yan Rui's team.
In the laser research laboratory, Yan Rui was describing the problems they encountered: "We now use gas injection to bombard the target material with laser to generate plasma. The plasma emits EUV radiation. The EUV radiation passes through periodic multi-layer thin film reflectors. The focusing system is incident on the reflective mask. The emitted EUV light wave passes through the projection system composed of reflective mirrors to image the geometric pattern of the integrated circuit on the reflective mask into the photoresist on the silicon wafer, thereby forming an integrated circuit. Required photolithography pattern.”
"Theoretically, there is no problem with this process." He Xingzhou nodded.
"But the problem is how to increase the wattage of the EUV light source while reducing particles, high-speed particles and other pollutants in the plasma atmosphere." Yan Rui said with a headache, "Otherwise the light source will deteriorate rapidly. Also, the extreme ultraviolet projection lithography system Reflective masks were used.”
"Our EUV mask defects are still as high as ldefect/cm2, and the manufacturing level of inspection machines must be further improved."
"I think Professor Lu's team should be able to solve the problem of the testing machine." He Xingzhou said, "As for the problem of the extreme ultraviolet light source, I have thought of a solution."
"What plan?" The group of academicians and experts looked at him.
He Xingzhou said: "Electrical energy can be used to increase the wattage of the light source!"
"After the high-power laser heats the load body to form plasma and reflects it multiple times, an extreme ultraviolet light source is formed. At this time, a discharge reaction chamber is designed to further transform the plasma and radiate brighter and purer extreme ultraviolet light. , if there are multi-layer mirrors, the nanometer scale of EUV will be further improved, and it may be possible to meet the requirements of the 3-nanometer process!"
In fact, this is the solution, but He Xingzhou said it a little more euphemistically.
"We have also thought about doing this!" Yan Rui seemed to have some ideas, she asked: "This electric energy reaction chamber..."
"I have the design drawings!" He Xingzhou said.
"Really?!" When everyone heard what he said, their spirits perked up and they quickly said, "Let's see!"
"Go to the conference room!" He Xingzhou smiled.
Everyone went to the conference room together. He Xingzhou called Lu Mi and asked her to open the design drawings and explain them.
When he finished speaking, the audience fell silent. Everyone is thinking and calculating.
After a full ten minutes, Yan Rui was the first to stand up and said happily: "Okay! My preliminary calculation shows that this solution is entirely possible to achieve the high-brightness extreme ultraviolet light source we require!"
"Yes, I think the same!" An old academician stood up and said excitedly: "This discharge reaction chamber is really a miracle! After the refraction loss of the light source, the electric energy converts the plasma to form a new high-energy plasma. Not only is there no light pollution , and also further improves the purity of extreme ultraviolet rays. The light knife produced in this way will probably be the best in the world!"
"General Manager He, you are really a genius, you can think of such a plan!"
"Then what are you waiting for? Let's go and try it quickly!" The experts couldn't help it.
"Let's start!" He Xingzhou said with a smile. He knew that this attempt would be successful! This is a design that I completed after more than a month of thinking and calculation after unlocking the lithography machine technology!
…
In the country of lights, the "Avengers" are holding a conference.
This is not the Avengers in anime and movies, but the EUV lithography machine technology alliance led by Bai Ying.
It is composed of industry giants such as Intel, AMD, Motorola and IBM, plus Sandia National Laboratories and Lawrence Livermore National Laboratory affiliated with White Eagle!
In addition to the one in White Eagle, the Western Alliance also has a similar one, consisting of more than 30 countries and hundreds of companies, all of which are related to photolithography machines and chips.
ASML in Windmill Country can produce the world's top extreme ultraviolet lithography machine because of their support!
At present, because of the "comprehensive cooperation" agreement, White Eagle's EUV Alliance and Western Alliance's EUV Alliance have begun to cooperate to discuss "cooperation details."
Alliance President Foster is sitting at the head. He was just appointed by Commander White Eagle not long ago, and his style is much tougher than the previous one!
The participating members are all representatives from international giants! It can be said that these companies represent the world's top lithography machines and chip technologies!
"Sakura submitted suggestions to us, saying that the extreme ultraviolet photoresist technology has been conquered by China, and they hope to open up the extreme ultraviolet photoresist market!" Foster said slowly, "What are your opinions?"
"Can't open!" The first representative to speak objected. He was Moulton, a representative from Dow Group, which is also one of the top five photoresist companies in the world.
He said righteously: "Now that we have reached a cooperation agreement, we must advance and retreat together. Today, a photoresist will be opened, and tomorrow someone will talk about opening a photolithography machine transmission lens, and the day after tomorrow someone will talk about opening a photolithography machine bearing. , If this continues, won’t our cooperation agreement be nothing more than a piece of paper?”
"Mr. Moulton is right." Some members immediately supported his point of view and said: "Lithography machines and chip manufacturing technology must be firmly in our hands, and not a single hole can be opened!"
"Furthermore, it is still unclear whether China's extreme ultraviolet photoresist is a laboratory product or a mass production product. If this is a scam arranged by them, we will be fooled!"
Moulton's opinion received unanimous support, and Foster nodded: "In this case, we will maintain our existing measures."
In fact, for the EUV Alliance, they are not on the same front as Sakura. When the alliance was first established, it was to target Sakura's semiconductor industry.
So they don't care about the life or death of Sakura's related industries!
"Everyone should know about the trends in China's semiconductor industry." Foster moved on to the next motion.
"They have also set up an organization to jointly develop photolithography machines and want to catch up with us!"
Mentioning this, Heimer, the representative of ASML Lithography Company, said disdainfully: "It is impossible for them to catch up with us within ten years!"
"I can say this, even if we give them the design drawings of the extreme ultraviolet lithography machine, the Orientals will not be able to make it!"
"This is the world's most advanced industrial technology, and they are still far behind!"
After Heimo finished speaking, the representatives present all laughed, with arrogant looks on their faces. Many people had the same idea as him.
Someone also reminded: "We cannot relax our vigilance. In the past year, they have made breakthroughs in many technologies!"
When he mentioned this, Foster's face turned cold and he emphasized: "Everyone, why are their technological breakthroughs so fast?"
"We suspect that some members may not comply with the regulations and leak technical information!"
"So starting from today, all high-end equipment and technology transfers between members must be submitted to the alliance for review, and private transactions are prohibited!"
There have been audits before, but this time we will increase the intensity to ensure that there will be no technical leaks.
On this point, all members unanimously agreed that only technology monopoly can allow them to make a lot of money continuously!
Another representative of Qualcomm asked: "We do not sell high-end chips in the East now, which will greatly damage our company. When can we develop and sell them?"
"Yes, our computer chip market has also been severely affected!" Representatives from companies such as Intel, IBM and AMD could not sit still.
Foster motioned for everyone to be quiet and said, "This is why we are meeting here today."
"Before the meeting, I had already communicated with ASML. They are designing a new generation of extreme ultraviolet lithography machines with a 3-nanometer process."
"We need to work together to help them come up with mature 3-nanometer process technology lithography machines and more advanced lithography machines as soon as possible. If our chip technology is upgraded to one level, we can open up first-level chips."
"And there has been a lot of pressure from the East recently. They will soon make concessions, and everyone will gain more than what they have lost now!"
Everyone communicated with each other and expressed their opinions. In the end, a preliminary agreement was reached. So many companies and institutions joined forces again to help ASML break through more advanced lithography machine technology.
ASML representative Heimer was even more excited and said at the meeting: "Within two years, with your help, within one year, we guarantee to deliver a mature new generation of extreme ultraviolet light with 3-nanometer process technology. Engraving machine!"
"Okay!" Foster was very happy. In this way, he could also communicate with the boss.
And he has made such great achievements as soon as he took office. The future is bright!
He wished Haimer: "I hope you can achieve your goals as soon as possible. The EUV Alliance is your strongest backing!"
He secretly thought that by that time, those Easterners would definitely feel despair!
…
At the end of the EUV Alliance meeting, China, Northwest Optoelectronics Technology Research Institute.
He Xingzhou, Yan Rui and others are testing their extreme ultraviolet light source.
The discharge reaction chamber he designed previously has been manufactured and connected to the laser emitter. There are various reflective lenses in the middle to form an extreme ultraviolet light knife generator.
"First test, fire the laser!" In the laboratory, Yan Rui looked at the instrument carefully and gave the experimental order.
