Chapter 100 and 101 Extreme Ultraviolet Lithography Technology (Additional updates for you and subscribers)

Style: Science Author: fire holeWords: 4395Update Time: 24/01/12 00:35:25
He Xingzhou opened the quantum optical brain and checked related technologies.

The first is the chip. In terms of chip classification, it is mainly divided into two categories: carbon-based chips and silicon-based chips. Of course, there is also a photon quantum chip, in which all information is stored in a ball of "light".

"I am made by optical quantum chip technology." said the quantum optical brain.

Hearing what it said, He Xingzhou inexplicably thought of the Giant of Light, "Is there any advanced civilization that can turn itself into light?"

Quantum Optical Brain: "Of course, some advanced civilized creatures have completely abandoned their bodies made of silicon-based or carbon-based elements and become pure energy bodies."

"A civilization of that level is already a rare civilization in the universe."

He Xingzhou retracted his thoughts and continued to look at carbon-based chips and silicon-based chips online. Carbon-based chips include biochip technology, protein chips, gene chips, cell chips, tissue chips...

Even with the most basic knowledge of biochip design, unlocking requires 100,000 units of energy!

Among silicon-based chips, there is Blue Star Humanity’s current chip development route.

"Unlocking the design knowledge of silicon-based chips for the 7-nanometer process requires 50,000 units of energy."

“Unlocking the design knowledge of silicon-based chips for the 5-nanometer process requires 100,000 units of energy.”

"Unlocking the design knowledge of 3-nanometer silicon-based chips requires 150,000 units of energy."

Further down, there are 2 nanometer, 1 nanometer and even angstrom levels, which must be unlocked one by one, but He Xingzhou thinks it is not necessary.

Because when the chip manufacturing process is lower than 3 nanometers, the manufacturing difficulty will rise sharply, and it will face the quantum tunneling effect, causing some transistors to fail.

At this time, the silicon-based material can be changed and made of new materials... But He Xingzhou saw that the quantum chip knowledge, which is more advanced than this kind of chip, only requires 500,000 units of energy to unlock, and its performance directly crushes these traditional computing chips.

With that energy point and energy, wouldn’t it be nice to unlock the quantum chip?

He Xingzhou directly unlocked these three levels of silicon-based chips, spending 300,000 units of energy.

Quantum chips will be unlocked later, because now the whole country is waiting for high-end silicon-based chips, and there is no rush for quantum chips.

In addition, it is the relevant knowledge of photolithography machines.

Lithography machines are also involved in ultra-precision processing technology. He Xingzhou unlocked the cutting technology of ultra-precision processing last year and developed the Longteng series of machine tools.

This time, the "ultra-precision special processing technology" must be unlocked, which requires 100,000 energy points.

"To manufacture a photolithography machine, you also need photoresist." Photoresist, also called photoresist, is an etching-resistant thin film material that is needed for semiconductor processing.

Photoresist is also on Baiying et al.'s list.

"UV photoresist is suitable for 436nm-365nm lithography technology. It requires 10,000 units of energy to unlock."

"Deep UV photoresist is suitable for 248nm-193nm lithography. It requires 30,000 units of energy to unlock."

"Extreme ultraviolet photoresist is commonly used in 11nm-14nm lithography and requires 50,000 units of energy to unlock."

"Radiation photoresist, used for higher resolution lithography, needs to be unlocked before unlocking all the above photoresists."

What He Xingzhou needs to use is extreme ultraviolet photoresist. Currently, the world's most advanced photolithography machine is the extreme ultraviolet photolithography machine, which can produce silicon-based chips with a 3-nanometer process.

With another 80,000 units of energy, He Xingzhou also unlocked the photoresist material technology.

Finally, it is the most important photolithography machine manufacturing technology.

The lithography machine is claimed to be the pinnacle of human industrial technology! Use light as a knife to carve at the nanoscale!

The world's most advanced EUV (extreme ultraviolet) lithography machine has more than 100,000 parts. If you want to transport a lithography machine, you need to prepare 20 trucks, three cargo planes, and 40 containers to complete the transportation!

The various technologies it involves cover almost all industrial fields. Some experts once asserted that no country can independently manufacture photolithography machines!

In Baiying Qifang's list, all the key materials and components of the lithography machine are marked with an X! It is to suppress the development and manufacturing of photolithography machines in China in all aspects!

The main factor that determines the performance of a lithography machine is the "light knife". The shorter the wavelength of the light knife, the more precise chips can be carved.

Ultraviolet, deep ultraviolet, and extreme ultraviolet. Currently, only ASML in the windmill country in the world can manufacture extreme ultraviolet lithography machines.

It is worth mentioning that China already has certain deep ultraviolet lithography technology. He Xingzhou also included the information. He only needs to unlock the extreme ultraviolet lithography machine technology.

Quantum Optical Brain: "Consume 300,000 units of energy to unlock extreme ultraviolet lithography machine technology."

After unlocking these, He Xingzhou only had 25,000 unit energy left. These are accumulated from the ever-expanding photovoltaic power stations during this period.

"It feels like the photovoltaic power station can no longer handle the energy consumption." He Xingzhou took a look and saw that in the technology tree, subsequent technology unlocks would start with hundreds of thousands of units of energy. The photovoltaic power station could save 10,000 yuan a day, which is only 30,000 units a month. Ten thousand.

"We have to find a way to build a nuclear power plant!" If there is a nuclear power plant to provide energy for ourselves, we should not have to worry about energy issues within a year or two.



Magic City, Institute of Microelectronics.

Here, the country's first 22-nanometer lithography machine, a deep ultraviolet lithography machine, was manufactured.

He Xingzhou came here with his people and the team of Academician Yan Rui from the Northwest Institute of Optoelectronics.

His team includes all the top talents in chip research and development in the country!

At the project opening ceremony, He Xingzhou spoke to the top talents in the audience: "Everyone, we come from all over the country, from different research institutes, companies, and units. Today we are gathered here, abandoning prejudices, interests and barriers, and have only one goal. !”

"In order to break the blockade in the field of lithography machines and high-end chips, we have developed a new generation of extreme ultraviolet lithography machines and manufactured completely domestic 3-nanometer process chips! Find a real 'heart' for the Eastern Dragon to take off. !”

"Bah bang bang bang!" Everyone applauded, and some chip designers and engineers looked excited. How had they ever thought that these big names in the industry could gather together?

If you were in other countries, you would never dare to think about it. Even the most powerful companies would compete with each other and would never be able to open up their talents and technologies like this!

And the units behind them, after receiving the order, donated their resources without reservation! Just for this 3nm process chip to come out as soon as possible!

He Xingzhou divided the R&D team into four groups. The first group was led by Academician Shi Cheng from the Institute of Microelectronics. He was an important figure involved in the design and manufacturing of deep ultraviolet lithography machines. He is responsible for leading the design of chips for the 3-nanometer process and the construction of extreme ultraviolet lithography machines.

The second group, led by Academician Lu Jianye, uses Longteng machine tools to manufacture related accessories for photolithography machines, such as polishing ultra-high-speed lenses!

The third group, led by academician Yan Rui and researchers from the Institute of Optoelectronics, is responsible for researching and manufacturing the "Extreme Ultraviolet Light Knife".

The fourth group, led by Fu Yuquan, a materials expert from Huaxin Group, researches and manufactures materials needed for photolithography machines and chips, such as high-purity silicon and photoresist.

Researchers from various research institutes and group companies are arranged into four groups to cooperate with each other in research and development.



The outside world knows nothing about China’s efforts to gather national strength to tackle high-end chips.

As time goes by, the situation becomes more and more serious.

That month, Huawei Company announced that it would stop selling the latest Huawei mobile phones and related smart products, and the supply of other products was also reduced.

As soon as the news came out, Huawei's business was hit hard, and consumers protested.

However, this was just the beginning. Immediately afterwards, Rice Company, which originally claimed to enter the high-end smart product market, also announced that the new model would not be released for the time being due to a shortage of chips.

The same is true for other smart product companies. Those companies that have just obtained He Xingzhou's technology authorization to manufacture smart glasses also said that the Lingguang series smart glasses plan has been postponed indefinitely!

This isn't over yet! Because chips are the heart of modern electronic products, it is not just products such as mobile phones that use high-end chips.

Automobile companies such as China FAW Group and BYD announced that the manufacturing of high-end electromagnetic floats has been temporarily suspended due to insufficient supply of on-board chips!

A smart home company announced that high-end smart home products will be temporarily suspended, etc.!

These are still industries that are visible to the general public. Invisible industries, such as some high-end equipment that the military needs to equip, are also in trouble because of the lack of chips.

On the Internet, the public also began to express panic about this. Someone asked: "What exactly happened? Will domestic high-end smart products be stopped from being sold in the future? Are foreign countries not even making money from chips?"

"Not making money? Haven't you read the news? This month, the performance of companies such as Apple and Samsung has skyrocketed, and the high-end smart product market is almost completely occupied by foreign products!"

"Yes, even if I support domestic production, domestic products are all mid- to low-end products. I heard that they are all sold now, and they are all chips in stock. What will happen when they run out?"

"Can't we develop it ourselves?"

"Do you know how difficult it is to develop lithography machines? By the time we catch up with foreign countries, the market will be completely occupied by foreign companies. We will fall behind step by step, and the gap will become wider and wider by then!"

"Don't talk about chips, the latest computer graphics cards are no longer available! I'm really vomiting. Now if I want to buy high-end computer graphics cards, I have to buy them from abroad, which is very expensive!"

"It can't take so long abroad, right? It should be released in a few months. I heard that Qualcomm and Intel are protesting!"

Some people are still looking forward to foreign countries being able to unlock the limitations of chips.

But they don't know that the world's technological landscape has undergone earth-shaking changes. This time, the attitude of Bai Ying and others is firmer than ever before!



"Lu Mi, help me enter the program!" He Xingzhou was currently at the National Industrial Software Research Institute.

He is designing an industrial software specifically for designing chips.

In the past, they used foreign software to design chips. Now that the new list appears, chip design software is no longer allowed and they have to design it themselves.

"The program has been entered." Lu Mi's sweet voice sounded in He Xingzhou's ears, and a new piece of industrial software had been generated.

He Xingzhou opened it, converted the format of the original chip design drawing from the Modou Microelectronics Research Institute, entered it, and then began to improve it.

He is now standing on the shoulders of his predecessors, and is assisted by the scientific and technological information of quantum optical brain. The speed of research and development is increasing by leaps and bounds!

Several other groups also received some technical information provided by He Xingzhou.

It's like solving a math problem. If you haven't learned the relevant knowledge points and rely on yourself to create an equation to solve the problem, it's unknown whether you can do it and how long it will take.

Now He Xingzhou is equivalent to providing them with the equation, they just need to understand and apply it.

And these talents are all elites gathered from across the country. For them, understanding and applying them is simply a piece of cake.

Every day, some technical problems are overcome in the related fields of lithography machines and chips.

For example, with the application of extreme ultraviolet photoresist materials, Fu Yuquan's team has obtained laboratory products and is studying technology for large-scale industrial production.



On Sakura Island, a photoresist industry meeting is being held.

As one of the essential materials for semiconductor manufacturing, photoresist is on the list!

Ninety percent of the world's high-end photoresists come from Sakura Island, and some are produced in Lantern Country.

Because of the "comprehensive cooperation" agreement reached by Sakura, Baiying and others some time ago, sales of high-end photoresists to China have been completely stopped.

This has had a huge impact on international photoresist giants such as Synthetic Rubber (JSR), Tokyo Onka (TOK), Fujifilm and other groups.

"Aoki-kun, our photoresist revenue has been reduced by 30% in one month. According to this trend, our company will suffer heavy losses!" The ISR representative was dissatisfied with the big shot Daiki Aoki who came to the meeting. Protested, "The agreement you participated in did not consider the harm to our industry at all!"

"That's right, we have never leaked any relevant technology, why are we not even allowed to sell our products?" A representative of Yinghua Group questioned, "China Enterprises is our big customer!"

Aoki Dagui knew that they were all full of resentment, but this was decided by the higher authorities and he could not change it.

He had no choice but to say: "High-end semiconductor manufacturing is in our and Western markets. We will hold a semiconductor-related international trade event. If your company adjusts its business direction, it can still maintain the market."

"These are completely two different things!" a Fujifilm representative said dissatisfied. "As far as I know, during this incident, Dengguo Dow Group took the opportunity to expand and seize the market, which has seriously affected our operations."

Not everyone supports this so-called "comprehensive cooperation", but they are opposed to it.

"Aoki-kun, we hope to lift this restriction as soon as possible!" This was their unanimous request.

"Gentlemen, don't worry. You are the pride of Sakura. High-end photoresist technology is in your hands. As long as you survive this period, you will still be the leader of photoresist in the world!" Aoki Dagui comforted them. , he knew that this decision could not be changed, so it was useless what they said. Today he came here to listen to their complaints.

"What if China breaks through the extreme ultraviolet photoresist process?" a JRS representative questioned.

Aoki Dagui smiled and said: "Technological breakthroughs cannot happen overnight."

"You can rest assured that China is now facing pressure from the seven industrial countries. They will inevitably make concessions. When the time comes, you will gain more! They will not be able to survive until that time!"

While he was smiling, he saw another representative walk into the conference room. It was Taichi Furukawa, the representative of Sumitomo Chemical Group. He looked anxious and shouted: "Gentlemen, something bad is going to happen!"